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Acceptable Probe Sigma values


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At Zeiss, our recommendation for the limiting value is anything under 0.001 mm for VAST XT and VAST XXT sensors. One major exception are probes that are qualified in RC-CAA mode for VAST XXT sensors, where the sigma values typically range between 0.002 mm - 0.020 mm.

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New probes are typically below 0.001mm (I usually see 0.0003-0.0005mm). I definitely inspect probes when the sigma increases (0.001mm or higher); although it is best practice to visually inspect probes more often, regarless of the recorded sigma values.

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