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Scan Lines on seal surfaces


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I was curious if anyone has seen any data to indicated there is depth to the scan lines that can occur on very polished surfaces. I know some companies don't like these marks from a visual perspective, but do these marks actually have any depth the could effect sealing between mating parts? or is this only a visual thing? This is more for my own curiosity as I will be using single points on this one.
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I don't recall measuring a depth of a scan line on O-ring surfaces in Semiconductor work, but I do know they did not want any markings of any kind on the seal surfaces. These were systems that had vacuum of 10 torr ("Torr is a unit of measure typically used for vacuums in the 1 to 760 Torr range").
We always used points, and then we had to visually inspect at a minimum of 10x for any marks from any single point that contacted the surface.
Typically, after contact inspection, the seal surfaces were re-polished.
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