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Status Window errors


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I'm getting several repeating error messages on my 322 O-inspect. Can anyone tell me what these might mean?
Doc2.docx
I know what the collision warnings and the "sensor did not carry out the measurement.............." mean.

It's the "481 ID chip not reacting", the "9 outer end position" & the "6 command rejected" errors.
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https://qualityforum.zeiss.com/topic/17234-status-window-errors/
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